Ukuhluzwa Okuphezulu Kokucoceka Kwemveliso Ye-Semiconductor Ecocekileyo Kakhulu
Inkcazo
Isihluzo segesi esihamba ngesantya esiphezulu – Yenzelwe ngokukodwa ukuhluzwa kwegesi kwinkqubo yobumsulwa obuphezulu kakhulu kwimveliso ye-semiconductor. Yenziwe ngokuchanekileyo ngentsimbi engagqwaliyo engama-316L, inoyilo lwemidiya yediski enekholamu ezininzi okanye edibeneyo ukuqinisekisa ukumelana okuphantsi kwisantya esiphezulu sokuhamba, kunye nokuchaneka kokuhluzwa okufikelela kwi-0.003μm ukuhlangabezana neemfuno zobumsulwa obuphezulu kakhulu. Ulwakhiwo lwesinyithi sonke luyenza ibe sisisombululo esifanelekileyo sokuhluzwa kwiindawo eziguquguqukayo zobushushu obuphezulu.
Uphawu lweMveliso
▶Zonke izakhiwo zentsimbi engagqwaliyo ezingama-316L— Iqinisekisa ukuqina kunye nokumelana nokugqwala.
▶Izinga lokuhamba eliphezulu, ukuxhathisa okuphantsi— Yenzelwe ukuhamba kwamanzi okuphezulu kunye nokulahlekelwa kancinci koxinzelelo.
▶Ukusebenza kakuhle kokugcinwa kwamasuntswana aphezulu kakhulu— Igqibelele kakhulu ekugcineni iimeko zicocekile kakhulu.
▶Ayimelani namaqondo obushushu aphezulu, uxinzelelo kunye nokugqwala— Ifanelekile kwiindawo ezinobungozi.
▶Iyahambelana neeGesi ezahlukeneyo zeNkqubo— Isebenziseka ngeendlela ezininzi kwizicelo zemizi-mveliso.
▶Ilungele ukwenziwa kweCleanroom, ukuvavanywa, kunye nokupakishwa— Ifanelekile ukusetyenziswa kwiindawo ezilawulwayo.
▶Uvavanyo lweNgqibelelo lwe-100%— Isihluzo ngasinye sivavanywa ngokupheleleyo ukuze kuqinisekiswe umgangatho.
▶Uvavanyo lwe-Helium oluyi-100%— Kuqinisekiswe ngovavanyo lokuvuza kwe-helium ukuqinisekisa ukuthembeka kwizicelo ezibalulekileyo.
Ishiti yedatha
Iiparameters zobugcisa
| Ipharamitha | Inkcazo |
|---|---|
| Izinto zeSihluzo | I-316L yentsimbi engagqwaliyo efakwe umgubo ocoliweyo |
| Izinto zeZindlu | Intsimbi engagqwaliyo engama-316L |
| Uxinzelelo lwe-Inlet oluphezulu | Ibha engama-207 |
| Uxinzelelo oluphezulu lokwahluka olusebenzayo | Ibha ye-5.2 |
| Izinga lokuVula koQinisekiso lweHelium | 2 x 10⁻¹⁰ cc/ngomzuzu |
| Izinga lokuvuza kovavanyo lweHelium | 1 x 10⁻¹⁰ cc/ngomzuzu |
| Unyango Lomphezulu | |
| Umphezulu wangaphandle | Ra < 1.6 μm |
| Umphezulu wangaphakathi | Ra < 0.2 μm |
| Ubushushu obuphezulu bokusebenza | |
| Igesi engasebenziyo | 400-500℃ |
| Igesi Ekonakalisayo Nesebenzayo | 50℃ |
| Ukusebenza kakuhle kokugcinwa kwamasuntswana | ≥99.9999999% (9LRV) @ 30 slpm |
| Ucoceko olusezantsi | ≤0.03 amasuntswana/ilitha @ > 0.01 μm, 30 slpm |
| Ubungakanani bokugcinwa kwamasuntswana | ≥0.003 μm |
Ubungakanani
Nantsi inombolo yenxalenye onokuyi-odola kunye neenkcukacha zobungakanani:
| Imodeli yeMveliso | Izinto zeSihluzo | Ukuchaneka kokuhluza (μm) | Uhlobo loQhagamshelo |
|---|---|---|---|
| Z01B-00647 | Intsimbi Engagqwaliyo engama-316L | 10~0.003 | 1/4” |
| Z01B-00648 | Intsimbi Engagqwaliyo engama-316L | 10~0.003 | 1/2” |
| Z01B-00649 | Intsimbi Engagqwaliyo engama-316L | 10~0.003 | 1/8” |
| Z01B-00650 | Intsimbi Engagqwaliyo engama-316L | 10~0.003 | 1” |
| Ingenziwa ngokwezifiso | Intsimbi Engagqwaliyo engama-316L | 10~0.003 | Njengoko Kufuneka |
Izicelo eziqhelekileyo
ezinye zezicelo eziqhelekileyo zeIzihluzi zeHigh Purity Bulk kunye ne-UtilitykwayeIzihluzi zeGesi eziHambayo kwiGas Pad:
1. Ukwenziwa kweeSemiconductor
*Iqinisekisa ukunikezelwa kwegesi ecocekileyo kakhulu kwiinkqubo zokwenza i-wafer, ukukrola, kunye nokufunxwa komphunga weekhemikhali (CVD).
*Igcina ubunyulu obuphezulu kwiinkqubo zokusasazwa kwegesi eninzi kwi-nitrogen, i-argon, kunye nezinye iigesi zokuthwala.
2. Imveliso yeMithi
*Ibonelela ngegesi engenazintsholongwane nengenazinhlayiya kwiindawo ezibalulekileyo zokuvelisa.
*Ixhasa ukuhluzwa okucocekileyo kakhulu kwiindawo zokucoca kunye neendawo ezilawulwayo ukugcina ukuthembeka kwemveliso.
3. Iinkqubo zeGesi zelebhu
*Isetyenziswa kwiindawo zelebhu ukucoca imijelo yegesi kwizixhobo zohlalutyo ezifana ne-gas chromatography kunye ne-mass spectrometry.
*Iqinisekisa iigesi ezicocekileyo kakhulu kwizicelo zophando novavanyo, ikhusela izixhobo ezibuthathaka.
4. Ukulungiswa kokutya neziselo
*Ihluza i-CO₂ kunye nezinye iigesi ezisetyenziswa kwi-carbonation, ukupakisha, kunye nokugcina ukutya, ukugcina ukhuseleko kunye nomgangatho.
*Uqinisekisa ukufumaneka kwegesi engenangcoliseko kwiindawo zokucubungula, ingakumbi kwiindawo zombane ezisebenzisa igesi eninzi.
5. Ishishini leoyile negesi
*Icoca imijelo yegesi yendalo kwi-gas pad filtration, isusa izinto ezingcolisayo ngaphambi kokuba zigcinwe okanye zithuthwe.
*Ikhusela izixhobo ezisezantsi komlambo ngokususa iinxalenye, ukufuma, kunye nokungcola kwiinkqubo zokuhamba kwegesi ezinoxinzelelo oluphezulu.
6. Ukwenziwa kweekhemikhali
*Ihluza iigesi eziluncedo ezifana ne-nitrogen kunye ne-argon ezisetyenziswa kwi-chemical synthesis kunye nee-reactions.
*Igcina ubunyulu begesi ukuthintela ungcoliseko kunye nokungahambisani kweempendulo.
7. I-Aerospace kunye noKhuselo
*Ihambisa iigesi ezicocekileyo kakhulu kwiindawo zokuvelisa nokuvavanya izixhobo kunye neenxalenye zeenqwelo-moya.
*Ukuqinisekisa ubunyulu begesi obuhlala buhleli kwiindawo ezilawulwayo zokuhlanganisa iinqwelo-moya nezixhobo zokhuselo.
8. Imveliso yamandla (Izityalo zamandla)
*Ihluza iigesi ezinoxinzelelo oluphezulu ukuze zipholile kwaye zisetyenziselwe ukupholisa, ingakumbi kwiindawo ezinobushushu obuphezulu.
*Iphucula ukusebenza kakuhle kwaye inciphisa ukuguguleka kwezixhobo ngokuthintela ungcoliseko kwiinkqubo zokupholisa nokuhamba kwegesi.
Ezi fIi-ilters zibalulekile kuyo nayiphi na indlela yokusetyenziswa efuna ukuhamba kwegesi okucocekileyo nokungaguquguqukiyo, ukuphucula ukhuseleko lwezixhobo,
ukusebenza kakuhle kwenkqubo, kunye nomgangatho wokugqibela wemveliso kumashishini onke.
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