Isishwankathelo sokwenziwa kweeSemiconductor

Ishishini le-semiconductor libandakanya iinkqubo ezintsonkothileyo ezifuna izixhobo ezicocekileyo kakhulu kunye nolawulo oluchanekileyo lwezinto ezingcolisayo.

Ukusetyenziswa kwezihluzo ezisemgangathweni ophezulu kubalulekile ekugcineni ukuthembeka kwenkqubo yokuvelisa.

Izihluzi zidlala indima ebalulekileyo ekususeni amasuntswana, izinto ezingcolisayo eziphilayo, kunye nezinye izinto ezingcolileyo ezinokuchaphazela umgangatho wemveliso yokugqibela.

Amanyathelo okuCwangcisa i-Semiconductor

Ukucubungula i-semiconductor kubandakanya amanyathelo amaninzi, kuquka ukucwangcisa i-chemical mechanical (CMP) kwiindawo ezigudileyo ze-wafer, i-photolithography, kunye nokufakwa kwefilimu encinci.

Inyathelo ngalinye lifuna izisombululo ezithile zokucoca ukuqinisekisa ukususwa kwezinto ezingcolisayo kunye nokugcinwa kweemeko ezicocekileyo kakhulu. Oku kuquka ukucoca ngamakhemikhali kunyeukuhluza igesiukususa ukungcola ngempumelelo.

Ukusetyenziswa kwezihluzo kwezi nyathelo kunceda ukuthintela iziphene nokuqinisekisa ukuveliswa kwee-semiconductors ezikumgangatho ophezulu.

Izisombululo zokuhluza zeMveliso yeSemiconductor

Izisombululo zokuhluza kwimveliso ye-semiconductor ziquka izihluzi ze-point-of-use (POU), izihluzi ze-membrane, kunye neendawo zokucoca, ezibalulekileyo ekususweni kwezinto ezingcolisayo kunye nokuqinisekisa ukusebenza kakuhle kokuhluza. Ezi zisombululo zenzelwe ukubonelela ngokuhluza okusebenzayo, ukuhla koxinzelelo oluphantsi, kunye nobomi benkonzo ende. Zisetyenziselwa ukususa amasuntswana, izinto ezingcolisayo eziphilayo, kunye nezinye izinto ezingcolileyo ezivela kulwelo lwenkqubo, iigesi, kunye neekhemikhali. Amanzi acocekileyo kakhulu abalulekile ekugcineni iimeko ezicocekileyo kakhulu, ngakumbi ekuhlanjululeni ikhemistri yenkqubo kwiiwafers kunye nokuxuba iikhemikhali zenkqubo ezixineneyo.

Ukuhluzwa Okuphezulu Kokusebenza Kakhulu Ekucutshungulweni KweeSemiconductor

Ukusebenza kokucoca kubaluleke kakhulu ekucutshungulweni kwe-semiconductor ukuqinisekisa ukususwa kwee-particles ezingcolisayo kunye nokugcinwa kweemeko ezingenazo ii-particles, ezicocekileyo kakhulu.

Izihluzi ezinokugcinwa kwamasuntswana amaninzi, ukuvuleka kwamanzi, kunye nobunyulu zisetyenziselwa ukubonelela ngokhuseleko oluphezulu kwiinkqubo zokwenziwa kwee-semiconductor.

Ezi zihluzo zenzelwe ukubonelela ngobomi benkonzo obude nokunciphisa isidingo sokutshintshwa rhoqo.

Iintlobo zeeFilters zeSemiconductor

Izihluzi ze-semiconductorzibalulekile kwinkqubo yokwenziwa kwee-semiconductor, njengoko zinceda ekugcineniubumsulwa beegesi, ulwelo, kunye nezinye izinto ezisetyenziswa kwimveliso. Zithintela ungcoliseko ekuphazamiseni izixhobo ezibuthathaka kunye neenkqubo ekwenziweni kwe-semiconductor. Nazi ezinye iintlobo zezihluzi ze-semiconductor ezisetyenziswa kakhulu kwishishini:

1. Izihluzi zesinyithi ezixutyiweyo

Zenziwe ngezinto ezifana nentsimbi engagqwaliyo, ezi zihluzo zinemingxuma emincinci eyenziwe yiiipowder zesinyithi ezisilayoZisetyenziselwa ukucoca amasuntswana aqinileyo kwiigesi okanye kulwelo, ukuqinisekisa indawo ecocekileyo yokwenziwa kwe-semiconductor.

Izicelo:Isetyenziselwa ukuhluza igesi ecocekileyo kakhulu, njenge-nitrogen okanye i-argon, nakwiinkqubo ze-vacuum eziphezulu kakhulu.

2. Izihluzi zePTFE (Polytetrafluoroethylene)

Izihluzi ze-PTFE ziyamelana kakhulu neekhemikhali kwaye ziyakwazi ukumelana ne-aggressive media. Zisetyenziswa kakhulu kwi-semiconductorushishino lokucocaiigesi ezirhabaxa kunye nolwelo.

Izicelo:Isetyenziswa rhoqo kwiinkqubo zokufunxwa komphunga weekhemikhali (i-CVD) kunye nokugrumba.

3. Izihluzi zeCeramic

Izihluzi zeseramikhi zihlala zisetyenziswa kwiindawo apho kukho amaqondo obushushu aphezulu.enemingxumaUlwakhiwo lwezihluzo zeseramikhi luvumela ukuhluzwa okusebenzayo ngaphandle kokubeka emngciphekweni ubunyulu bezinto ezihluzwayo.

Izicelo:Isetyenziselwa iinkqubo zobushushu obuphezulu, njengakwi-reactive ion etching (RIE) okanye i-plasma etching.

4. IiFiltha zeHEPA (uMoya osebenza kakuhle kakhulu)

Ezi zihluzo zenzelwe ukubamba amasuntswana amancinci kakhulu, ngesiqhelo ukuya kuthi ga kwi-0.3ii-micronsKumagumbi acocekileyo e-semiconductor, izihluzi ze-HEPA zibalulekile ekugcineni iindawo ezicoceke kakhulu.

Izicelo:Isetyenziswa kumagumbi acocekileyo kwaye njengenxalenye yeenkqubo ze-HVAC kwi-semiconductor fabs.

5. Izihluzi zeKhabhoni eziSebenzisiweyo

Izihluzi zekhabhoni ezisebenzayo zisetyenziselwa ukufunxa iigesi kunye nomphunga, kuquka ii-volatious organic compounds (VOCs) kunye nezinye izinto ezingcolisayo.

Izicelo:Ihlala ifumaneka kwiinkqubo zokukhupha umoya okanye kwiinkqubo apho umoya kufuneka ucocwe kumphunga weekhemikhali.

6. IiFilthi ezipheleleyo

Ezi zihluzo zilinganiswe ukubamba zonke iisuntswana ezingaphezulu kobukhulu obuthile ngokusebenza kakuhle kakhulu. Zihlala zisetyenziselwa amanqanaba okugqibela okucoca, ukuqinisekisa ukuba akukho zingcolisi zidlulayo.

Izicelo:Isetyenziswa ekuhluzeni ulwelo olucocekileyo kakhulu kunye neegesi kwinqanaba lokugqibela kwimveliso ye-semiconductor.

7. Izihluzi ze-Electrostatic

Ezi zihluzo zisebenzisa iitshaja ze-electrostatic ukubamba amasuntswana amancinci kakhulu ukuba angahluzwa ngoomatshini kuphela. Zisebenza kakuhle ekuhluzeni uthuli olucolekileyo kunye nomphunga othile.

Izicelo:Isetyenziswa kwiindawo apho amasuntswana amancinci okanye ii-aerosols kufuneka zibanjwe ngokufanelekileyo.

8. Izihluzi zesigaba segesi

Ezi zihluzo zisetyenziselwa ngokukodwa ukuhluza igesi, rhoqo kwiindawo apho ubunyulu bubaluleke kakhulu. Zinokususa izinto ezincinci, ii-VOC, kunye nezinye izinto ezingcolisayo kwiigesi ezisetyenziswa ekwenzeni i-semiconductor.

Izicelo:Isetyenziswa kwiinkqubo zokuhambisa igesi kwiinkqubo ezifana ne-photolithography okanye i-chemical vapor deposition.

Ukukhethwa kwesihluzo esifanelekileyo kuxhomekeke kuhlobo lwesixhobo esihluzwayo, izinto ezithile ezingcolisayo eziza kususwa, kunye neemeko zokusebenza (ubushushu, uxinzelelo, kunye nokuhambelana kweekhemikhali).

9.Izicelo zokucoca ezithile

Ishishini le-semiconductor lihlala litshintsha, kwayeubuchwepheshe bokucocaziyaphucuka ukuhlangabezana neemfuno zokwenziwa kwesizukulwana esilandelayo. Iiteknoloji zokuhluza ezisakhasayo, ezifana nokuhluza i-nanofiltration kunye nezihluzi ze-membrane eziphambili, zibonelela ngokusebenza kakuhle nangokusebenzayo ekususeni izinto ezingcolisayo. Ezi zisombululo ziphambili zivumela ukuveliswa kweekhemikhali kunye neegesi ezicocekileyo kakhulu, ezibalulekileyo ekucutshungulweni kwe-semiconductor. Ngokubandakanya ezi teknoloji zokuhluza ziphambili, abavelisi banokufikelela kwisivuno esiphezulu, amazinga aphantsi eziphene, kunye nokwanda kwemveliso. Njengoko ishishini liqhubeka lihambela phambili, uphuhliso lweetekhnoloji ezintsha zokuhluza luya kudlala indima ebalulekileyo ekuvumeleni ukuveliswa kwee-semiconductors ezincinci, ezikhawulezayo, nezinamandla ngakumbi.

Impembelelo kwiNdalo yeNkqubo zokuHluza

Iinkqubo zokucoca ezisetyenziswa kwimveliso ye-semiconductor zinokuba nempembelelo enkulu kwindalo esingqongileyo, ngakumbi ngokubhekiselele ekusetyenzisweni kwamandla kunye nokuveliswa kwenkunkuma. Ukusetyenziswa kwezisombululo zokucoca ezisebenzayo kakhulu kunokunceda ukunciphisa ukusetyenziswa kwamandla kunye nokunciphisa ukuveliswa kwenkunkuma. Ukukhetha izindlu zokucoca ezinobuhlobo nokusingqongileyo, ezifana nezo zenziwe nge-polyethylene enoxinano oluphezulu, kunokunceda ekunciphiseni impembelelo kwindalo esingqongileyo yeenkqubo zokucoca. Ukongeza, ukusetyenziswa kwamanzi acocekileyo kakhulu kwimveliso ye-semiconductor kunokunceda ukunciphisa inani lamanzi amdaka aveliswayo. Ngokusebenzisa iinkqubo zokucoca ezinobuhlobo nokusingqongileyo, abavelisi be-semiconductor banokunciphisa umkhondo wabo kwindalo esingqongileyo kwaye banegalelo kwikamva elizinzileyo ngakumbi.

Uhlalutyo lweeNzuzo zeendleko zeeNkqubo zokuHlunga

Uhlalutyo lweendleko-nenzuzo kwiinkqubo zokucoca kwimveliso ye-semiconductor lubalulekile ukuqinisekisa ukuba iingenelo zokucoca zingaphezulu kweendleko. Izisombululo zokucoca ezisebenzayo kakhulu zinokukhokelela ekongeni kakhulu iindleko ngokunciphisa isidingo sokutshintshwa rhoqo kwezihluzi kunye nokunciphisa ixesha lokungasebenzi. Ukukhetha izindlu zezihluzi ezinobomi obude benkonzo kunokunceda ekunciphiseni iindleko zokulungisa kunye nokwandisa ubomi benkqubo yokucoca. Ukongeza, ukusetyenziswa kweenkqubo zokucoca kunokunceda ukunciphisa iindleko zokulahla inkunkuma kunye nokunciphisa impembelelo yokusingqongileyo yokuvelisa i-semiconductor. Ngokwenza uhlalutyo olunzulu lweendleko-nenzuzo, abavelisi be-semiconductor banokuqinisekisa ukuba iinkqubo zabo zokucoca zilungiselelwe ukusebenza kakuhle kunye nokusebenza kakuhle kweendleko.

Iindlu zokucoca kunye nezihluzi zeenkonzo ngokubanzi

Iinkqubo zokucoca zenzelwe ukubonelela ngendlela ekhuselekileyo nethembekileyo yokufaka nokusebenzisa izihluzi kwiinkqubo zokuvelisa ii-semiconductor, ukuqinisekisa ukunciphisa okusebenzayo kokungcolisa. Ii-silicon wafers zidlala indima ebalulekileyo kweli shishini, njengoko zibalulekile ekwenzeni ii-semiconductors kunye nezibonisi, nto leyo ebangela ukunciphisa okusebenzayo kokungcolisa kunye nokuqinisekiswa komgangatho. Izihluzi zenkonzo ngokubanzi zenzelwe ukubonelela ngesisombululo esingabizi kakhulu kwizicelo zokucoca ezilula ukuya kwezinzima. Zisetyenziselwa ukubonelela ngenkqubo yokucoca ethembekileyo ngaphandle kokuchitha imali eninzi.

Ukuphucula ukusebenza kakuhle kweMveliso yeeSemiconductor

Ukusetyenziswa kwezihluzo ezikumgangatho ophezulu kunye nezisombululo zokucoca kunokunceda ukuphucula ukusebenza kakuhle kokwenziwa kwee-semiconductor. Ukusebenzisa iteknoloji yokucoca ephucukileyo kunye nolawulo olusebenzayo lokungcola kunokuphucula kakhulu ukusebenza kakuhle ngokubanzi. Ezi zisombululo zokucoca zibalulekile kwizicelo ezahlukeneyo, kubandakanya iisekethe ezidibeneyo, ukuze kunikezelwe iziphumo ezilungileyo kunye nokonga iindleko kushishino.

Ngokususa izinto ezingcolisayo nokugcina iimeko ezicocekileyo kakhulu, izihluzi zinokunceda ukunciphisa iziphene nokuphucula isivuno.

Ukusetyenziswa kwezihluzo kunokunceda ekunciphiseni isidingo sokutshintshwa rhoqo kunye nokunciphisa ixesha lokungasebenzi.