Kutheni ukuhluzwa kwegesi kubalulekile kwiMveliso yeeSemiconductors?

Kwimveliso ye-semiconductor, nokuba yinto encinci engcolileyo ethwala igesi inokukhokelela kwiziphene ze-wafer,

ilahleko yesivuno, kunye nexesha lokungasebenzi kwezixhobo ezingacwangciswanga.Ukuhluzwa kwegesingoko ke ayisiyonto ixhasayo nje kuphela

—sisikhuselo esibalulekileyo esikhusela uzinzo lwenkqubo, umgangatho wemveliso, kunye nokusebenza kakuhle kwemveliso ixesha elide.

Njengoko kulandelayo, siza kuchaza ukuba kutheni ukuhluzwa kwegesi kubalulekile kwiifektri ze-semiconductor, zeziphi iingozi ezinceda ekupheliseni, kunye nendlela iinjineli, ii-OEM, kunye namaqela okuthenga anokwenza ngayo izigqibo ezinolwazi xa ekhetha izisombululo ezifanelekileyo zokuhluzwa kwegesi kwiinkqubo zawo.

Indima Efihlakeleyo Yokucoceka Kwegesi Kwimveliso Yee-Semiconductor

Ingcinga eqhelekileyo ngexesha lokuthengwa kwasekuqaleni kukuba iigesi ze-ultra-high-purity (UHP) ezibonelelwa ngabathengisi abaqinisekisiweyo "zicocekile ngokwaneleyo" kwaye azidingi ukuhluzwa okongeziweyo.

Enyanisweni, ubumsulwa begesi kwindawo yokuhambisa kuphela yindawo yokuqala—hayi imeko yokugqibela eyenzeka ngaphakathi kwezixhobo ze-semiconductor.

Ukuveliswa kwee-semiconductor zanamhlanje kuxhomekeke kuluhlu olubanzi lweegesi zenkqubo ezibalulekileyo, kuquka:

•I-nitrogen

•I-hydrogen

•I-Argon

•Iigesi ezikhethekileyo ezisetyenziswa ekugrumbeni

•Ukususwa

•Iinkqubo zokusebenzisa iziyobisi

Nangona ezi gesi zinokuhlangabezana nemigangatho ye-UHP xa ziphuma kumthengisi, ungcoliseko lunokungeniswa kwangoko xa igesi ingena kwisiseko esicocekileyo—ngemibhobho, iivalvu, izixhobo zokufaka, abalawuli boxinzelelo, kunye noqhagamshelo oluphindaphindwayo lwezixhobo.

Kwanamanqanaba amancinciamasuntswana, ukufuma, okanye iintsalela zeekhemikhaliinokuchaphazela kakubi uzinzo lwenkqubo.

Ukungacoceki kakuhle kwegesi kukhokelela ekunyukeni kwamazinga eziphene, ukuncipha kwemveliso ye-wafer, kunye nokuziphatha kwezixhobo okungaqinisekanga, ekugqibeleni kunyusa iindleko zobunini. Yiyo loo nto ukuhluzwa kwegesi okusebenzayo kuyinto ephambili yokulawula ungcoliseko kwimveliso ye-semiconductor, kuvala umsantsa phakathi kweenkcukacha zobonelelo lwegesi kunye neemeko zobugcisa zehlabathi lokwenyani.

Ziziphi iintlobo zeZingcolisi ezisongela iinkqubo zeSemiconductor?

Xa kuxoxwa ngokuhluzwa kwegesi, amaqela amaninzi okuthenga aqala ngokugxila kuphelaubungakanani bamasuntswana.

Nangona kunjalo, iinkqubo ze-semiconductor zinovelwano kwiindlela ezininzi zongcoliseko, kwaye ukungayihoyi ingcoliseko engeyiyo i-particles kunokukhokelela kwiingozi zenkqubo ezifihlakeleyo kunye nokulahleka kwesivuno sexesha elide.

1. Amasuntswana: Eyona Ngxaki Ibonakalayo

Iinxalenye ze-sub-micron zezona zinto zibangela ngqo iziphene ze-wafer.

Nje ukuba zifakwe kwiigesi zenkqubo, ezi nxalenye zingahlala kwiindawo ze-wafer, ziphazamise ukwakheka kwefilimu encinci, okanye zenze iziphene zasekuhlaleni ngexesha le-lithography kunye namanyathelo okukrola.

Umahluko phakathiUkucoca nge-0.1 µm kunye ne-0.01 µmayikhawulezi—idla ngokuba yinto egqibeleleyo.

Nangona izihluzi ze-0.1 µm zinokubamba inkunkuma enkulu, amasuntswana amancinci asenokungena kwiindawo eziphambili zenkqubo, apho ubukhulu beempawu buqhubeka buncipha. Kwiindawo ezinjalo, nokuba lisuntswana elinye eliphunyukileyo linokuguqulela kwilahleko yesivuno enokulinganiswa okanye imiba yokuthembeka esezantsi.

2. Ukungcola okufumayo, ioyile kunye neekhemikhali

Ayizizo zonke izinto ezingcolisayo ezibonakalayo. Ukufuma okulandelelanayo kunokuchaphazela kakhulu i-ALD, i-CVD, kunye neenkqubo zokugrumba ngokutshintsha i-reaction kinetics, ukufana kwefilimu, kunye nokuphindaphinda. Kwimilinganiselo yokufukama, kwanamanqanaba eenxalenye ngebhiliyoni anokwanela ukubangela ukuguguleka kwenkqubo.

Inkungu yeoyile kunye neentsalela ze-organic zihlala zivela kwiicompressor, iivalvu, izitywini, kunye nezixhobo zokuphatha igesi ezisezantsi. Ezi zinto zingcolisayo zisenokungavusi ii-alamu ezikhawulezileyo, kodwa ekuhambeni kwexesha zinokutyhefa ii-catalysts, zingcolise amagumbi, kwaye zonyuse amaxesha okugcinwa kwazo—ngamaxesha amaninzi ngaphandle kwesizathu esicacileyo.

3. Ingqiqo ephambili yoThengo

? "Yintoni kanye kanye esiyihluzayo—kwaye incinci isoloko ingcono?"

Ukuhluzwa kwegesi okusebenzayo akubhekiselele ekukhetheni umlinganiselo omncinci we-micron okhoyo.

Imalungaukuqonda iprofayili epheleleyo yongcoliseko—amasuntswana, ukufuma, kunye nokungcola kweekhemikhali

—kunye nokukhetha icebo lokucoca elikhusela ukuzinza kwemveliso kunye nokuqina kwesixhobongaphandle kokwazisa okugqithisileyo

ukuhla koxinzelelo okanye ubunzima benkqubo.

Indlela Ungcoliseko lweGesi Oluchaphazela Ngayo Isivuno, Iindleko kunye Nokuthembeka Kwezixhobo

Ungcoliseko lwegesi ludla ngokujongwa njengengxaki yobuchwephesha, kodwa kwimveliso ye-semiconductor ngokukhawuleza lukhula lube yingxaki ebalulekileyo kwishishini.

Nokuba yinto enye engcolisayo inokubangela ukulahleka okungaphaya kwexabiso lesihluzi segesi.

Isiganeko songcoliseko sinokubangela i-wafer scrap, apho zonke iibhetshi kufuneka zilahlwe ngenxa yeziphene ezibangelwa ziisuntswana okanye ukungazinzi kwenkqubo. Kwangaxeshanye, izixhobo ezichaphazelekileyo zihlala zifuna ixesha lokungasebenzi elingacwangciswanga lokuhlolwa, ukucoca amagumbi, kunye nokufaneleka, okuphazamisa iishedyuli zemveliso kunye nokunciphisa ukwenziwa kwezinto ezintsha. Kwiimeko ezingacacanga kangako, ungcoliseko lukhokelela ekusetyenzisweni ngokutsha kunye nokulahleka kwesivuno kancinci kancinci, apho iziphene zikhula kancinci kwaye iingcambu kunzima ukuzilandela.

Xa kujongwa ngolu hlobo, uqoqosho luyacaca. Ixabiso lokuhluza igesi lincinci xa lithelekiswa nelahleko enokubakho enxulumene nee-wafers ezilahliweyo, ixesha lezixhobo ezilahlekileyo, kunye nomgangatho wemveliso ophantsi. Utyalo-mali oluncinci ekuhluzeni igesi ngokufanelekileyo lusebenza njengokhuseleko kwiingozi ezinkulu zokusebenza nezemali.

Imbono yoKuthenga

"Izihluzo zegesi azizondleko ezifunekayo—zizinto zokulawula umngcipheko."

Kumaqela okuthenga kunye nokufuna igesi, ukuhluzwa kwegesi okusebenzayo akufanele kuvavanywe kungekuphela nje ngexabiso leyunithi, kodwa nangokwazi kwayo ukukhusela imveliso, ukuzinzisa izixhobo, kunye nokunciphisa iindleko zizonke zobunini kulo lonke ixesha lokuvelisa.

Apho ukuhluzwa kwegesi kubaluleke kakhulu ngaphakathi kwi-Semiconductor Fab

Ukuqonda apho kusetyenziswa khona ukuhluzwa kwegesi ngaphakathi kwi-semiconductor fab kubaluleke njengokuqonda oko kuhluzwayo. Iingozi zokungcoliswa ziyahluka kwinkqubo yokuhambisa igesi, kwaye ukuhluzwa okusebenzayo kufuna indlela eneengqimba endaweni yendawo enye yokuhluza.

Imigca yegesi eninzi

Imigca yegesi eninzi yenza umqolo wenkqubo yokusasazwa kwegesi ephakathi yefab. Nangona le migca yenzelwe ukucoceka okuphezulu, ungcoliseko lusenokungeniswa ngokusebenzisa imibhobho emide, abalawuli boxinzelelo, iivalvu, kunye nemisebenzi yokulungisa. Amasuntswana aphuma phezulu anokuhamba imigama emide aze aqokelelene ngokuhamba kwexesha, okwenza ukuhluzwa kwegesi eninzi kube ngumqobo wokuqala ofunekayo ukunciphisa umthwalo wongcoliseko olupheleleyo olungena kwifab.

Ukucoca indawo yokusetyenziswa (POU)

Ukucoca indawo osetyenziswa kuyo kudla ngokuba yeyona ndlela ibalulekileyo yokuzikhusela. Zifakelwe ngaphambi kokuba igesi ingene kwisixhobo sokucubungula, izihluzi ze-POU zikhusela kwizinto ezingcolisayo eziveliswa ngezantsi kwenkqubo yobuninzi, kuquka:

•Amasuntswana akhululwe kwizixhobo

•Izitywino

•Uqhagamshelo lwemitha yokugqibela

Ngokwembono yolawulo lwenkqubo, izihluzi ze-POU zibonelela ngenqanaba eliphezulu lokunciphisa umngcipheko, njengoko ziqinisekisa ubunyulu begesi kanye apho kubaluleke khona—kwindawo yokungena kwezixhobo. Yingakho iinkqubo ze-semiconductor eziphambili zihlala zichaza ukulinganiswa kwe-micron encinci kwinqanaba le-POU.

Izixhobo zeNkqubo kunye neeNdawo zoNxibelelwano lweZixhobo

Kwindawo edibanisa inkqubo yokuhambisa igesi kunye nezixhobo zenkqubo, ukuhambelana neemfuno zesixhobo se-OEM kubalulekile. Izihluzi kufuneka zihambelane noqhagamshelo oluchaziweyo, amazinga okuhamba, imida yoxinzelelo, kunye nemigangatho yococeko ukuze kuthintelwe ukungenisa isiphithiphithi, ukwehla koxinzelelo, okanye iingozi zokufakelwa.

Kubavelisi bezixhobo kunye neempahla ngokufanayo, ukuhluza kwezi ndawo zonxibelelwano akupheleli nje ekucocekeni, kodwa kukwamalunga nokuhlanganiswa, ukuthembeka, kunye nokusebenza okuphindaphindwayo kuzo zonke izixhobo kunye nemigca yemveliso.

Umbuzo Oqhelekileyo Wokuthenga

? "Sifanele sifake izihluzi phi kwinkqubo, kwaye zeziphi iinkcukacha ezifunekayo kwindawo nganye?"

Impendulo ixhomekeke kumngcipheko wongcoliseko, uvakalelo lwenkqubo, kunye noyilo lwenkqubo. Isicwangciso sokuhluza igesi esiyilwe kakuhle silinganisela ukhuseleko olukhulu, ukuchaneka kwendawo yokusetyenziswa, kunye nokuhambelana kwezixhobo ukuze kunikezelwe ubunyulu begesi obuhlala buhleli kuyo yonke into.

Imibuzo Emithathu Ebalulekileyo Omele Uyibuze Ngaphambi Kokukhetha I-Gas Filter

Ukukhetha isihluzi segesi se-semiconductor akuyonto ilula ukuyichaza—kufuna ukuqonda ngokucacileyo umngcipheko wenkqubo, iimfuno zesicelo, kunye nempembelelo yokusebenza kwexesha elide. Ukubuza imibuzo efanelekileyo kwangethuba kunceda amaqela okuthenga aphephe ubunjineli obugqithisileyo, ukungakhuseleki ngokwaneleyo, kunye nokungafani kwabathengisi.

1. Ukuqonda Imveliso: Yintoni Esiyidingayo Ngokwenene?

Omnye wemibuzo yokuqala abathengi abayibuzayo kukuba ukucoca kufanele kube kuhle kangakanani. Uvavanyo lwe-micron olufunekayo luxhomekeke kubuntununtunu benkqubo, ubungakanani bamaqhuqhuva, kunye neemfuno zesixhobo. Iinkqubo eziphambili zihlala zifuna ukucoca okuncinci okanye okuncinci kakhulu, ngelixa amanqanaba aphezulu anokunyamezela amanqanaba aqatha.

Ayizizo zonke iinkqubo ze-semiconductor ezinomngcipheko ofanayo wongcoliseko. Izixhobo ezahlukeneyo kunye nokusetyenziswa kwazo kunokufuna amanqanaba ahlukeneyo okuhluza, okwenza isisombululo esinye "esifanela bonke" singasebenzi kakuhle okanye sibe yingozi.

Enye ingongoma eqhelekileyo yokudideka kukuba ingabaizihluzi zegesi kunye nezicoci zegesiziyatshintshana.

Izihluzi zenzelwe ukususa amasuntswana kunye nezinto ezithile ezingcolisayo, ngelixa izihluzi zijolise ekungcoleni kwinqanaba leemolekyuli. Kwizicelo ezininzi ezibalulekileyo, ziyahambelana endaweni yokuba zihlangane.

2. Iikhrayitheriya zokukhetha: Siyikhetha njani iNkcazelo echanekileyo?

Ukukhetha i-micron engcono kunokuba kuyimfuneko kunokubonakala kukhuselekile, kodwa ukuhluza kakhulu kunokufaka uxinzelelo olungafunekiyo, okuchaphazela uzinzo lokuhamba kwegesi kunye nokusebenza kwesixhobo.

Isihluzi esifanelekileyo silinganisela ulawulo longcoliseko kunye nokusebenza kakuhle kwenkqubo.

Ukukhethwa kwezinto nako kudlala indima ebalulekileyo. Izihluzi zentsimbi engagqwaliyo kunye nezesinyithi ezinemingxuma zahlukile kumandla oomatshini, ukucoceka, kunye nobomi benkonzo. Ukukhetha izinto ezifanelekileyo kuchaphazela ngokuthe ngqo ixesha elide lezihluzi, imijikelo yokugcinwa, kunye neendleko zizonke zobunini.

Isantya sokuhamba kwamanzi kunye nokuhla koxinzelelo kufuneka kuhlolwe rhoqo ngokwemeko yenkqubo ethile yegesi.

Isihluzi esisebenza kakuhle ephepheni sisenokuphazamisa uzinzo lwenkqubo ukuba ezi parameters azifaniswanga ngokufanelekileyo.

3.Ukufaneleka kwesicelo: Ngaba kuya kusebenza kwiNkqubo yethu?

Ngaphandle kweenkcukacha ezichaziweyo, abathengi kufuneka baqinisekiseukuhambelana kwesicelo.

Izihluzi kufuneka zilungele iigesi ezithile ezisetyenziswayo—ezifana ne-nitrogen, i-hydrogen, i-argon, okanye iigesi ezikhethekileyo

—ngaphandle kokubeka emngciphekweni ukhuseleko okanye ukusebenza.

Okubaluleke ngokulinganayo kukubaukuhlanganiswa nezixhobo ze-OEM kunye neenkqubo zokuhambisa igesi.

Ukukwazi ukwenza ngokwezifiso uqhagamshelo, ubukhulu, kunye neempawu zokuhamba kwamanzi kuqinisekisa ukufakwa okungenamthungo kwaye kunciphisa umngcipheko wokudibanisa. Kubavelisi beempahla ze-semiconductor kunye nezixhobo, eli nqanaba lokulingana lidla ngokuba yinto ebalulekileyo ekukhetheni ababoneleli.

Iimpazamo eziqhelekileyo ekuThengweni kweSemiconductor Gas Filter

Ngexeshaisihluzi segesi se-semiconductorukuthengwa kwezinto, iingozi ezininzi azibangelwa ziindleko, kodwa zibangelwa kukungagqitywa

uphononongo kunye neengcinga ezingachanekanga. Le theyibhile ingezantsi igxininisa iimpazamo eziqhelekileyo zokuthenga, iingozi zazo ezifihlakeleyo, kunye nendlela efanelekileyo yokwenza izigqibo ukunceda abathengi baphephe iimpazamo ezibizayo.

Uluhlu olufutshane olu-3 lokuvavanya ababoneleli beSemiconductor Gas Filter

Ukukhetha umthengisi wesihluzi segesi se-semiconductor kuxhomekeke kwiisigqibo solawulo lomngcipheko, kungekuphela nje umsebenzi wokubeka amaxabiso.

Ngaphaya kweenkcukacha, abathengi kufuneka bagxile ekuqondeni ubuchwephesha, uqeqesho lokuvelisa, kunye nenkxaso yexesha elide ye-OEM.

Yintoni Omele Uyijonge Kumthengisi

1. Ubuchule boBugcisa Umthengisi ofanelekileyo uyaziqonda izicelo ze-semiconductor kwaye unokubonelela ngedatha yovavanyo, inkxaso yokuqinisekisa, kunye neengcebiso zenqanaba lesicelo, kungekuphela nje amaphepha edatha emveliso.

2. Ukwenziwa kweMveliso kunye noLawulo loMgangatho Ukuhambelana kubalulekile. Abathengi kufuneka bavavanye uzinzo lwezinto, iinkqubo zokucoca kunye nokucoceka, kunye nokuphindaphinda kwenani leemveliso, zonke ezichaphazela ngokuthe ngqo ubumsulwa begesi kunye nokuthembeka kwezixhobo.

3. Ukwenziwa ngokwezifiso kunye neNkxaso ye-OEM Uninzi lweenkqubo ze-semiconductor zifuna izinto ezingaphezulu kwesiqhelo. Ukukwazi ukwenza ngokwezifiso i-interfaces, ubungakanani, amazinga okuhamba, kunye neendawo zokuhlala, kunye nokuxhasa ukuhlanganiswa kwezixhobo, kubalulekile—ingakumbi kwi-OEM zezixhobo.

Umzekelo woMboneleli: HENGKO

I-HENGKOngumvelisi wee-high-purity semiconductor gas filters egxile kakhulu kwiIzisombululo ze-OEM kunye nezesiko.

Le nkampani igxile kwimveliso yokuhluza intsimbi engagqwaliyo efakwe i-sintered kunye neemveliso zokuhluza isinyithi ezinemingxuma ezenzelwe ukusetyenziswa kwegesi ye-UHP.

Iingenelo eziphambili ziquka:

•

Uyilo lokuhluza oluqhutywa yisicelo lweenkqubo zegesi ze-semiconductor

•

Iinkqubo zokuvelisa nezokucoca ezilawulwayo ukuze kubekho ukuhambelana okuphezulu

•

UnamandlaUbuchule bokwenza ngokwezifiso be-OEM, kuquka iindawo zokudibana, ubungakanani beembobo, kunye neempawu zokuhamba kwamanzi

Kwabavelisi beempahla nezixhobo, ababoneleli abanjengoHENGKO abameli nje kuphela umthombo wezinto, kodwa iqabane lokucoca ixesha elide elixhasa ukuveliswa kwe-semiconductor ezinzileyo nenokukhuliswa.