IiFiltha zeSeal ze-IGS Surface Mount C ezisebenza ngokuphezulu zeNkqubo zokuhanjiswa kweGesi zeSemiconductor
Inkcazo
IiFilters zeHENGKO Surface Mount zenzelwe ukuhlangabezana neemfuno ezifunekayo zeenkqubo zegesi ezihlanganisiweyo ezisetyenziswa kwizixhobo ze-semiconductor OEM. Zibonelela ngokucoca okuphambili kushishino kwi-0.003 µm, ezi zihluzo ziqinisekisa ukusebenza okugqwesileyo kunye nokuthembeka kunye nokusebenza kakuhle kokuthintela amasuntswana angama-≥99.9999999% (9-LRV) kwi-120 slpm.
Zenziwe ngomgubo wentsimbi engagqwaliyo we-316L oqinileyo ofakwe kwisixhobo sokucoca kunye nendlu, ezi zihluzo ziyahambelana neenkcukacha ze-SEMI F86-0304, zinezinto ezinamachweba amabini ezenzelwe iinkqubo zokusasazwa kwegesi ze-1.125” ezinoqwalaselo lwe-C-seal. Zixhasa uxinzelelo oluphezulu lokungena lwe-3.4 MPa kwi-100°C kunye nomahluko ophezulu woxinzelelo lokusebenza we-0.69 MPa kwi-100°C.
Ezi zihluzo ezikhethekileyo, ezihambelana neenkcukacha zesitywina sohlobo lwe-C kunye nohlobo lwe-W, zifezekisa ukucoceka okusezantsi ngokukhululwa kwamasuntswana
Ngomphezulu weRa< 1.6 µm ngaphandle kunye noRa< 0.13 µm ngaphakathi, zenzelwe ukumelana namaqondo obushushu aphezulu ukuya kuthi ga kwi-460°C. Zenzelwe ukuhlanganiswa okulula kunye nokuphuculwa koyilo lwemodyuli, ezi zihluzo zenza lula ukufakwa kunye nokugcinwa, zinceda ukuphucula ukusebenza kwenkqubo kwizicelo zokuhambisa kunye nokulawula igesi ye-semiconductor.
Uphawu lweMveliso
▶ Ulwakhiwo lwentsimbi engagqwaliyo oluyi-316L iyonke
▶ Uyilo oluncinci, ulwakhiwo oluncinci, ukonga indawo
▶ Iimpawu ezintle kakhulu zokutshintshwa kwegesi kunye nokuphuma kwayo emanzini
▶ Ubushushu obuphezulu, uxinzelelo oluphezulu, kunye nokumelana nokugqwala
▶ Indlu yentsimbi engagqwaliyo eyi-316L epolished electro-polished
▶ Ukufakela nokulungisa okulula nokufanelekileyo
▶ Ukutywinwa koomatshini, okungadityaniswenga ngokwesakhiwo ukuya kwindawo ephakathi
Ishiti yedatha
| Iiparameters zobugcisa | Amaxabiso |
|---|---|
| Izinto zeSihluzo | I-316L yePowder yeSintered yentsimbi engagqwaliyo |
| Izinto zeZindlu | Intsimbi Engagqwaliyo engama-316L |
| Uxinzelelo oluphezulu lokungena | 3.4 MPa @ 100°C |
| Umahluko oPhezulu woKusebenza | 0.69 MPa @ 100°C |
| Izinga lokuvuza kokuqinisekiswa kweHelium | 1x10⁻¹¹ cc/ngomzuzu |
| Izinga lokuvuza kovavanyo lweHelium | 1x10⁻⁹ cc/umzuzu |
| Unyango Lomphezulu | Umphezulu ongaphandle uRa< 1.6 μm |
| Umphezulu wangaphakathi uRa< 0.13 μm | |
| Ubushushu obuphezulu bokuSebenza | 460°C |
| Ukusebenza kakuhle kokuCandwa kwamasuntswana | ≥99.9999999% (9-LRV) @ 120 slpm (Ireferensi ye-MPPS, zonke iisuntswana) |
| Ucoceko olusezantsi | Ukukhululwa kwamasuntswana:< 0.03 amasuntswana/ilitha (< 1 isuntswana/ft³) |
| Iimeko eziguquguqukayo:< 10 ppb ukufuma | |
| Ubungakanani bokuCandwa kwamasuntswana | ≥0.003 μm |
| Uluhlu lokuhamba | 0 ~ 120 slpm |
Ubungakanani
Nantsi inombolo yenxalenye onokuyi-odola kunye neenkcukacha zobungakanani:
| Imodeli yeMveliso | Umgangatho wohambo | Ubude H (mm) | Ukuchaneka kokuhluza | Inqanaba lokucoca |
|---|---|---|---|---|
| Z01B-00637 | 10 slpm | 51.6 | 0.003 μm | C |
| Z01B-00638 | 40 slpm | 82.9 | 0.003 μm | C |
| Z01B-00687 | 80 slpm | 126.2 | 0.003 μm | C |
| Z01B-00688 | 120 slpm | 167.9 | 0.003 μm | C |
Izicelo eziqhelekileyo
Ukusetyenziswa nge-W-seal kunye ne-C-seal, iinkqubo zokuhambisa igesi ezisetyenziswa kumphezulu ezifakelwa ngaphezulu kwe-1.125” kunye ne-1.5”.
Thumela umyalezo wakho kuthi:
